SEMI E187

Specification for Cybersecurity of Fab Equipment

SEMI E187 provides cybersecurity requirements for secure semiconductor manufacturing equipment. The measures concern operating systems (e.g. by only using supported operating systems), network security, endpoint protection as well as security monitoring via regular vulnerability testing and malware scanning.

The following are not concerned by this standard: PLCs, SCADA systems, supervisory control and I/O devices communication via e.g. PROFINAT, PROFIBUS, MODBUS® or DeviceNET®.

As compliance can only be declared for the complete system, the machine builder is responsible for the declaration. We as Kontron AIS support our customers thoroughly with consulting including requirement evaluation, secure software as well as prepared documentation and reports to make their way to compliance short and comfortable.